Nano-imprint lithography of titania-based metaoptics

ongoing

"METAPRINT ""Nano-imprint lithography of titania-based metaoptics"" targets the nano-fabrication of near eye displays for augmented reality (AR) smart-glasses by direct printing hard ceramics (e.g. TiO2). It will deliver Photonic Metasurfaces capable of redirecting virtual images from a microdisplay to the eyes. SOLNIL’s patented technology leverages: 1) printable inks based on sol-gel chemistry delivering a superior TiO2 material having a record high refractive index (up to 2.7) and transparency to increase the field of view of the virtual images by 40% with respect to current offers; 2) a deposition process, spin- or dip-coating performed at room temperature and pressure (avoiding slow and costly ultra-high vacuum approaches currently used for TiO2, e.g. atomic layer deposition); 3) a direct printing method of the liquid inks to produce 3D patterns (avoiding toxic resists for lithography, lift-off steps, and etching steps). Thus, beyond the superior performances of our material, we provide a massive reduction of both CapEx (>50 times) and CoO (>4 times) with respect to the incumbent top-down lithographic methods. SOLNIL has freedom to operate in this field and is already servicing several leading actors in the AR market by providing the technology for near eye displays based on diffractive waveguides (currently the leading method). METAPRINT will go beyond this common approach adopting Photonic Metasurfaces to: 1) enhance the light management efficiency (extending the battery lifetime), 2) improve spatial resolution of the virtual images and 3) the colour brightness. METAPRINT will showcase the viability of our approach by building a pilot-production line of near eye displays over 200 mm flat wafers and on 100 mm curved ones in order to define their performances and reproducibility and to estimate the costs of the process. The commercial goal is to license this technology either to our existing customers or to new ones scouted through the action."