Defect inspection system
Sector: Chemical (Industrial) • Location: Finland
Source: TED Europa
VTT is looking to acquire an automated defect inspection tool for 200 mm and 300 mm patterned wafers. The tool will enable rapid tracking of defects that appear during the manufacturing process of functional devices (in-line and end-of-line in the Front-end process). The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in the pattern. The materials of t
- Status
- Closed
- Sector
- Chemical (Industrial), Manufacturing (Industrial)
- Location
- Finland
- Updated
- 3 Nov 2026
- Source
- TED Europa
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Tender Information
Participants
| Not available for this record. |
Status
Original status | contract award notice |
Taiyo status | Closed |
Taiyo last update | 2026-11-03 |
Contact
| Not available for this record. |
Description
Description | VTT is looking to acquire an automated defect inspection tool for 200 mm and 300 mm patterned wafers. The tool will enable rapid tracking of defects that appear during the manufacturing process of functional devices (in-line and end-of-line in the Front-end process). The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in the pattern. The materials of the patterns that the machine must be able to analyze are silicon oxides and nitrides, polysilicon, metals, and photoresist. The object of the tender process and the technical requirements are described in more detail in the invitation to tender documents. |
Original sector | Laboratory, optical and precision equipments (excl. glasses) |
Budget |
Location
Country | Finland |
Source
Source | TED Europa |
URL |
More Details
Record type | Tender |
Sector | Chemical (Industrial), Manufacturing (Industrial) |
Article published date | 2026-10-14 |
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