EBeam Lithographer
Sector: Road • Location: United Kingdom
Source: GOV.UK
The University has a requirement for an Electron Beam lithography system which has an acceleration voltage of at least 200 kV. It must be capable of the following: a) Ultra-fine line lithography: 3 nm linewidth, using commercially available resists. This can be obtained by its single-nm digit beam ...
- Status
- Closed
- Sector
- Road, Education
- Location
- United Kingdom
- Updated
- 3 Nov 2026
- Source
- GOV.UK
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Original status | complete |
Taiyo status | Closed |
Taiyo last update | 2026-11-03 |
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Description
Description | The University has a requirement for an Electron Beam lithography system which has an acceleration voltage of at least 200 kV. It must be capable of the following: a) Ultra-fine line lithography: 3 nm linewidth, using commercially available resists. This can be obtained by its single-nm digit beam ... |
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Location
Country | United Kingdom (UK) |
Source
Source | GOV.UK |
URL |
More Details
Record type | Tender |
Sector | Road, Education |
Article published date | 2026-03-03 |
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