Electron Beam Lithography (EBL) Tool
Contract notice · Sweden · Last reported Oct 2026
Source: TED Europa
Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be co
- Status
- Closed
- Sector
- Manufacturing (Industrial), Power Generation (CCGT), Education
- Location
- Sweden
- Updated
- 3 Nov 2026
- Source
- TED Europa
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Tender Information
Participants
| Not available for this record. |
Status
Original status | contract notice |
Taiyo status | Closed |
Taiyo last update | 2026-11-03 |
Contact
| Not available for this record. |
Description
Description | Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc. |
Original sector | Laboratory, optical and precision equipments (excl. glasses) |
Location
Country | Sweden |
Source
Source | TED Europa |
URL |
More Details
Record type | Tender |
Sector | Manufacturing (Industrial), Power Generation (CCGT), Education |
Article published date | 2026-10-07 |
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