European Tender Two Parallel Plate Plasma-enhanced Chemical Vapor Deposition (PECVD) Systems
Contract award notice · Netherlands · Last reported Feb 2026
Source: TED Europa
The University of Twente is tendering to purchase two new Plasma-Enhanced Chemical Vapor Deposition systems. The MESA+ Institute will invest in two new systems for deposition of (doped) dielectric thin films to upgrade and reinforce their state-of-the-art thin film technology and processing capacity. The systems will be used for moderate-temperature deposition of low stress thin films. For the fol
- Status
- Closed
- Sector
- Education, Chemical (Industrial), Manufacturing (Industrial)
- Location
- Netherlands
- Updated
- 3 Nov 2026
- Source
- TED Europa
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Status
Original status | contract award notice |
Taiyo status | Closed |
Taiyo last update | 2026-11-03 |
Contact
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Description
Description | The University of Twente is tendering to purchase two new Plasma-Enhanced Chemical Vapor Deposition systems. The MESA+ Institute will invest in two new systems for deposition of (doped) dielectric thin films to upgrade and reinforce their state-of-the-art thin film technology and processing capacity. The systems will be used for moderate-temperature deposition of low stress thin films. For the following materials: silicon dioxide (SiO2) boron-doped SiO2 (BSG) phosphorus-doped SiO2 (PSG) boron-phosphorus-doped SiO2 (BPSG) low-stress silicon nitride (SiNx) silicon oxynitride (SiOxNy) amorphous silicon (aSi) |
Original sector | Laboratory, optical and precision equipments (excl. glasses) |
Budget |
Location
Country | Netherlands |
Source
Source | TED Europa |
URL |
More Details
Record type | Tender |
Sector | Education, Chemical (Industrial), Manufacturing (Industrial) |
Article published date | 2026-03-07 |
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