Intent to Sole Source Keyence Confocal / Metrology System

2026-11-03

Please note : This is a Sole Source Notification .. Montana State University Procurement & Contract Services is considering a request from the Montana Microfabrication Facility , to award a Sole Source purchase to Keyence Corp of America for a non - contact , high - resolution optical metrology system to support inspection and characterization of microfabricated and photonic devices including photonic integrated circuits ( PICs ), waveguides , etched substrates , thin films , and full wafers . Total Contract Value is estimated at $ 185 , 000 . 00 . The determination of this Sole Source purchase is based on the following requirements : The required metrology system must be capable of : Measuring chip bow , etch depth , surface roughness , and film thickness Must be able to waveguide etch heights with widths of ~ 1 um Must have z resolution of ~ 1 nm with laser scanning microscopy and < 0 . 1 nm with white light interferometry Must have xy resolution of < 250 nm 150x lens objective for ultrahigh magnification in xy Low magnification ring lighting for ease of finding locations of interest on a large surface 16 - bit photomultiplier for the laser confocal for improved sensitivity for z mapping Measuring surfaces with widely varying reflectivity and roughness We measure transparent films , opaque films , smooth films , rough surfaces Measuring surfaces at large angles off normal to accommodate steep features and complex surface geometries

Montana

2026-04-29