Plasma Ashing System
Sector: Manufacturing (Industrial) • Location: Garching, Germany
Source: TED Europa
The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for
- Status
- Closed
- Sector
- Manufacturing (Industrial), Education
- Location
- Garching, Germany
- Updated
- 3 Nov 2026
- Source
- TED Europa
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Tender Information
Participants
| Not available for this record. |
Status
Original status | contract award notice |
Taiyo status | Closed |
Taiyo last update | 2026-11-03 |
Contact
| Not available for this record. |
Description
Description | The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection. |
Original sector | Laboratory, optical and precision equipments (excl. glasses) |
Location
Country | Germany |
City | Garching |
Source
Source | TED Europa |
URL |
More Details
Record type | Tender |
Sector | Manufacturing (Industrial), Education |
Article published date | 2026-10-26 |
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