Prior Information Notice – Maskless Laser Lithography System
Prior information notice · European Union · Last reported Jun 2026
Source: TED Europa
The Ferdinand-Braun-Institut (FBH) plans to procure a high-performance maskless laser lithography system within the framework of the EU-funded APECS programme. The system will be used for high-resolution patterning of semiconductor wafers to support the development of advanced heterointegration technologies, including InP- and GaAs-based chiplets. It is intended to enable rapid prototyping as well
- Status
- Prospective
- Sector
- Advanced Electronics, Manufacturing (Industrial), Education, Road
- Location
- Unknown (Europe)
- Updated
- 3 Nov 2026
- Source
- TED Europa
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Original status | prior information notice |
Taiyo status | Prospective |
Taiyo last update | 2026-11-03 |
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Description
Description | The Ferdinand-Braun-Institut (FBH) plans to procure a high-performance maskless laser lithography system within the framework of the EU-funded APECS programme. The system will be used for high-resolution patterning of semiconductor wafers to support the development of advanced heterointegration technologies, including InP- and GaAs-based chiplets. It is intended to enable rapid prototyping as well as efficient processing of wafers with diameters up to 200 mm. The equipment must provide sub-micron precision combined with high throughput and support modern multi-beam laser writing technologies. It will be installed in a cleanroom environment and must comply with ISO class 5 requirements. The procurement procedure is planned for 2026. |
Original sector | Industrial machinery |
Budget |
Location
Country | Unknown (Europe) |
Source
Source | TED Europa |
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More Details
Record type | Tender |
Sector | Advanced Electronics, Manufacturing (Industrial), Education, Road |
Article published date | 2026-06-11 |
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