Process Monitoring Tool
Contract notice · Germany · Last reported Feb 2026
Source: TED Europa
Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to intr
- Status
- Closed
- Sector
- Manufacturing (Industrial)
- Location
- Germany
- Updated
- 3 Nov 2026
- Source
- TED Europa
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Tender Information
Participants
| Not available for this record. |
Status
Original status | contract notice |
Taiyo status | Closed |
Taiyo last update | 2026-11-03 |
Contact
| Not available for this record. |
Description
Description | Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP. |
Original sector | Industrial machinery, Laboratory, optical and precision equipments (excl. glasses) |
Location
Country | Germany |
Source
Source | TED Europa |
URL |
More Details
Record type | Tender |
Sector | Manufacturing (Industrial) |
Article published date | 2026-03-07 |
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