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PVD for MRAM

Sector: Tunnel • Location: Belgium

Source: TED Europa

Tender
Contract Award Notice

A 300mm wafer compatible, multi-chamber PVD platform designed for high throughput of magnetic tunnel junctions. Additionally, the following PVD and process chamber designs that must be supported are: 1) Multi-cathode PVD chamber 2) a pre-clean chamber to remove native oxides and other contaminants, 3) degass/annealing capability and, 4) a cryogenic stage (<100K) option in, or ex, situ of the P

Status
Closed
Sector
Tunnel, LNG, Commercial, Chemical (Industrial), Manufacturing (Industrial)
Location
Belgium
Updated
3 Nov 2026
Source
TED Europa

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Tender Information FAQ

Tender Information

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The tender “PVD for MRAM” is a tender record in Taiyo, linked to the Tunnel sector. It is issued for works, goods, or services related to Belgium.

Participants

Not available for this record.

Status

Original status

contract award notice

Taiyo status

Closed

Taiyo last update

2026-11-03

Contact

Not available for this record.

Description

Description

A 300mm wafer compatible, multi-chamber PVD platform designed for high throughput of magnetic tunnel junctions. Additionally, the following PVD and process chamber designs that must be supported are: 1) Multi-cathode PVD chamber 2) a pre-clean chamber to remove native oxides and other contaminants, 3) degass/annealing capability and, 4) a cryogenic stage (<100K) option in, or ex, situ of the PVD modules. Furthermore, the platform must be compatible with Front Opening Universal Pods with a 25-slot capacity, including an Equipment Front End Module and load-lock system for wafer loading. Finally, the deposition must be computer controlled and automated following defined recipes. As an optional, the platform should be compatible with automatic recipe upload from fab management software via a standardized protocol, for example SECS/GEM.

Original sector

Laboratory, optical and precision equipments (excl. glasses)

Location

Country

Belgium

Source

Source

TED Europa

URL

More Details

Record type

Tender

Sector

Tunnel, LNG, Commercial, Chemical (Industrial), Manufacturing (Industrial)

Article published date

2026-03-10

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