Silicon deep reactive ion etcher (Si DRIE)
Contract award notice · Denmark · Last reported Dec 2025
Source: TED Europa
DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026.
The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging fr
- Status
- Closed
- Sector
- Education, Government, Commercial
- Location
- Lyngby, Denmark
- Updated
- 3 Nov 2026
- Source
- TED Europa
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Status
Original status | contract award notice |
Taiyo status | Closed |
Taiyo last update | 2026-11-03 |
Contact
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Description
Description | DTU Nanolab requires a silicon deep reactive ion etcher (Si DRIE) to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q4 2026. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. |
Original sector | Laboratory, optical and precision equipments (excl. glasses), Installation services (except software) |
Budget |
Location
Country | Denmark |
City | Lyngby |
Source
Source | TED Europa |
URL |
More Details
Record type | Tender |
Sector | Education, Government, Commercial |
Article published date | 2025-12-09 |
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